Computational lithography [electronic resource] / Xu Ma and Gonzalo R. Arce.

By: Ma, Xu, 1983-Contributor(s): Arce, Gonzalo R | ProQuest (Firm)Material type: TextTextSeries: Wiley series in pure and applied opticsPublication details: Oxford : Wiley-Blackwell, 2010Description: xv, 226 p. : illSubject(s): Microlithography -- Mathematics | Integrated circuits -- Design and construction -- Mathematics | Photolithography -- Mathematics | Semiconductors -- Etching -- Mathematics | Resolution (Optics)Genre/Form: Electronic books.DDC classification: 621.381531 LOC classification: TK7872.M3 | M3 2010Online resources: Click to View
Tags from this library: No tags from this library for this title. Log in to add tags.
Star ratings
    Average rating: 0.0 (0 votes)
No physical items for this record

Includes bibliographical references and index.

Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.

There are no comments on this title.

to post a comment.