Computational lithography
Ma, Xu, 1983-
Computational lithography [electronic resource] / Xu Ma and Gonzalo R. Arce. - Oxford : Wiley-Blackwell, 2010. - xv, 226 p. : ill. - Wiley series in pure and applied optics . - Wiley series in pure and applied optics. .
Includes bibliographical references and index.
Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.
Microlithography--Mathematics.
Integrated circuits--Design and construction--Mathematics.
Photolithography--Mathematics.
Semiconductors--Etching--Mathematics.
Resolution (Optics)
Electronic books.
TK7872.M3 / M3 2010
621.381531
Computational lithography [electronic resource] / Xu Ma and Gonzalo R. Arce. - Oxford : Wiley-Blackwell, 2010. - xv, 226 p. : ill. - Wiley series in pure and applied optics . - Wiley series in pure and applied optics. .
Includes bibliographical references and index.
Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.
Microlithography--Mathematics.
Integrated circuits--Design and construction--Mathematics.
Photolithography--Mathematics.
Semiconductors--Etching--Mathematics.
Resolution (Optics)
Electronic books.
TK7872.M3 / M3 2010
621.381531