Computational lithography (Record no. 55880)

MARC details
000 -LEADER
fixed length control field 01584nam a2200433Ia 4500
001 - CONTROL NUMBER
control field EBC588875
005 - DATE AND TIME OF LATEST TRANSACTION
control field 20240120131912.0
006 - FIXED-LENGTH DATA ELEMENTS--ADDITIONAL MATERIAL CHARACTERISTICS
fixed length control field m o d |
007 - PHYSICAL DESCRIPTION FIXED FIELD--GENERAL INFORMATION
fixed length control field cr cn|||||||||
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION
fixed length control field 091215s2010 enka sb 001 0 eng d
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
Canceled/invalid ISBN 9780470596975
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
Canceled/invalid ISBN 047059697X
035 ## - SYSTEM CONTROL NUMBER
System control number (MiAaPQ)EBC588875
035 ## - SYSTEM CONTROL NUMBER
System control number (Au-PeEL)EBL588875
035 ## - SYSTEM CONTROL NUMBER
System control number (CaPaEBR)ebr10419114
035 ## - SYSTEM CONTROL NUMBER
System control number (CaONFJC)MIL275596
035 ## - SYSTEM CONTROL NUMBER
System control number (OCoLC)689995793
040 ## - CATALOGING SOURCE
Original cataloging agency MiAaPQ
Transcribing agency MiAaPQ
Modifying agency MiAaPQ
050 #4 - LIBRARY OF CONGRESS CALL NUMBER
Classification number TK7872.M3
Item number M3 2010
082 04 - DEWEY DECIMAL CLASSIFICATION NUMBER
Classification number 621.381531
Edition number 22
100 1# - MAIN ENTRY--PERSONAL NAME
Personal name Ma, Xu,
-- 1983-
245 10 - TITLE STATEMENT
Title Computational lithography
Medium [electronic resource] /
Statement of responsibility, etc. Xu Ma and Gonzalo R. Arce.
260 ## - PUBLICATION, DISTRIBUTION, ETC.
Place of publication, distribution, etc. Oxford :
Name of publisher, distributor, etc. Wiley-Blackwell,
Date of publication, distribution, etc. 2010.
300 ## - PHYSICAL DESCRIPTION
Extent xv, 226 p. :
Other physical details ill.
490 1# - SERIES STATEMENT
Series statement Wiley series in pure and applied optics
504 ## - BIBLIOGRAPHY, ETC. NOTE
Bibliography, etc. note Includes bibliographical references and index.
533 ## - REPRODUCTION NOTE
Type of reproduction Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Microlithography
General subdivision Mathematics.
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Integrated circuits
General subdivision Design and construction
-- Mathematics.
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Photolithography
General subdivision Mathematics.
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Semiconductors
General subdivision Etching
-- Mathematics.
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Resolution (Optics)
655 #4 - INDEX TERM--GENRE/FORM
Genre/form data or focus term Electronic books.
700 1# - ADDED ENTRY--PERSONAL NAME
Personal name Arce, Gonzalo R.
710 2# - ADDED ENTRY--CORPORATE NAME
Corporate name or jurisdiction name as entry element ProQuest (Firm)
830 #0 - SERIES ADDED ENTRY--UNIFORM TITLE
Uniform title Wiley series in pure and applied optics.
856 40 - ELECTRONIC LOCATION AND ACCESS
Uniform Resource Identifier <a href="https://ebookcentral.proquest.com/lib/bacm-ebooks/detail.action?docID=588875">https://ebookcentral.proquest.com/lib/bacm-ebooks/detail.action?docID=588875</a>
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