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		No cover image available Fundamental principles of optical lithography [electronic resource] : the science of microfabrication / Chris Mack. by Mack, Chris A \| ProQuest (Firm). Material type: Text; Format: electronic available online ; Literary form: Not fiction Publication details: Chichester, West Sussex, England ; Hoboken, NJ, USA : Wiley, c2007Online access: Click to View Availability: No items available. Add to cart (remove)
		No cover image available Computational lithography [electronic resource] / Xu Ma and Gonzalo R. Arce. by Ma, Xu, 1983- \| Arce, Gonzalo R \| ProQuest (Firm). Series: Wiley series in pure and applied opticsMaterial type: Text; Format: electronic available online ; Literary form: Not fiction Publication details: Oxford : Wiley-Blackwell, 2010Online access: Click to View Availability: No items available. Add to cart (remove)
		Lithography [electronic resource] : main techniques / edited by Stefan Landis. by Landis, Stefan \| ProQuest (Firm). Material type: Text; Format: electronic available online ; Literary form: Not fiction Publication details: London : Hoboken, N.J. : ISTE ; Wiley, 2011Online access: Click to View Availability: No items available. Add to cart (remove)
		No cover image available Lithography [electronic resource] : principles, processes and materials / Theodore C. Hennessy, editor. by Hennessy, Theodore C \| ProQuest (Firm). Series: Engineering tools, techniques and tables \| Nanotechnology science and technology seriesMaterial type: Text; Format: electronic available online ; Literary form: Not fiction Publication details: New York : Nova Science, c2011Online access: Click to View Availability: No items available. Add to cart (remove)
		No cover image available Lithography [electronic resource] : principles, processes and materials / Theodore C. Hennessy, editor. by Hennessy, Theodore C \| ProQuest (Firm). Series: Engineering tools, techniques and tables \| Nanotechnology science and technology seriesMaterial type: Text; Format: electronic available online ; Literary form: Not fiction Publication details: New York : Nova Science, c2011Online access: Click to View Availability: No items available. Add to cart (remove)