Nanofabrication using focused ion and electron beams [electronic resource] : principles and applications / edited by Ivo Utke, Stanislav Moshkalev, Phillip Russell.

Contributor(s): Utke, Ivo | Moshkalev, Stanislav | Russell, Phillip, 1955- | ProQuest (Firm)Material type: TextTextSeries: Nanomanufacturing series ; v. 1Publication details: Oxford ; New York : Oxford University Press, 2011Description: xvi, 813 pSubject(s): Nanostructured materials | Nanotechnology | Electron beams -- Industrial applications | Ion bombardment -- Industrial applicationsGenre/Form: Electronic books.DDC classification: 620.1/15 LOC classification: TA418.9.N35 | N2525 2011Online resources: Click to View
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Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.

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