Nanofabrication using focused ion and electron beams principles and applications /

Nanofabrication using focused ion and electron beams principles and applications / [electronic resource] : edited by Ivo Utke, Stanislav Moshkalev, Phillip Russell. - Oxford ; New York : Oxford University Press, 2011. - xvi, 813 p. - Nanomanufacturing series ; v. 1 .


Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.






Nanostructured materials.
Nanotechnology.
Electron beams--Industrial applications.
Ion bombardment--Industrial applications.


Electronic books.

TA418.9.N35 / N2525 2011

620.1/15