Sputtering materials for VLSI and thin film devices / by Jaydeep Sarkar.

By: Sarkar, JaydeepMaterial type: TextTextPublisher: Oxford ; Boston : William Andrew Publishing, 2014Edition: First editionDescription: 1 online resource (614 pages) : illustrationsContent type: text Media type: computer Carrier type: online resourceISBN: 9780815519874Subject(s): Microelectronics -- Materials | Flat panel displays -- Materials | Sputtering (Physics)Genre/Form: Electronic books.Additional physical formats: Print version:: Sputtering materials for VLSI and thin film devices.DDC classification: 621.381 LOC classification: TK7871 | .S37 2012Online resources: Click to View
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Includes bibliographical references and index.

Description based on print version record.

Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.

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