Normal view MARC view ISBD view

Sputtering materials for VLSI and thin film devices /

Sarkar, Jaydeep.

Sputtering materials for VLSI and thin film devices / by Jaydeep Sarkar. - First edition. - 1 online resource (614 pages) : illustrations

Includes bibliographical references and index.

ISBN: 9780815519874

Subjects--Topical Terms:
Microelectronics--Materials.
Flat panel displays--Materials.
Sputtering (Physics)

Index Terms--Genre/Form:
Electronic books.

LC Class. No.: TK7871 / .S37 2012

Dewey Class. No.: 621.381

Print
Add to your cart (remove)
Suggest for purchase
Save record
BIBTEX Dublin Core MARCXML MARC (non-Unicode/MARC-8) MARC (Unicode/UTF-8) MARC (Unicode/UTF-8, Standard) MODS (XML) RIS ISBD
More searches

Search for this title in:
Other Libraries (WorldCat) Other Databases (Google Scholar) Online Stores (Bookfinder.com) Open Library (openlibrary.org)