Enabling technologies for MEMS and nanodevices [electronic resource] : advanced micro and nanosystems / edited by Henry Baltes ... [et al.].

Contributor(s): Baltes, Henry | ProQuest (Firm)Material type: TextTextPublication details: Weinheim [Germany] : Wiley, 2013Description: xii, 427 p. : illISBN: 9783527675043 (electronic bk.)Subject(s): Microelectronics | Nanotechnology | Microelectromechanical systemsGenre/Form: Electronic books.LOC classification: TK7874 | .E53 2013Online resources: Click to View
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Includes bibliographical references and index.

Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.

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