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Enabling technologies for MEMS and nanodevices advanced micro and nanosystems /

Enabling technologies for MEMS and nanodevices advanced micro and nanosystems / [electronic resource] : edited by Henry Baltes ... [et al.]. - Weinheim [Germany] : Wiley, 2013. - xii, 427 p. : ill.

Includes bibliographical references and index.

Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.

ISBN: 9783527675043 (electronic bk.)

Subjects--Topical Terms:
Microelectronics.
Nanotechnology.
Microelectromechanical systems.

Index Terms--Genre/Form:
Electronic books.

LC Class. No.: TK7874 / .E53 2013

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