Semiconductor strain metrology [electronic resource] : principles and applications / Terence K.S. Wong.

By: Wong, Terence K. SContributor(s): ProQuest (Firm)Material type: TextTextPublication details: [Saif Zone, Sharjah, U.A.E] ; Oak Park, IL : Bentham Science, [2012]Description: 136 p. : illSubject(s): Semiconductors -- Design and construction -- Materials | Compound semiconductors -- Design and construction -- Materials | Silicon-on-insulator technologyGenre/Form: Electronic books.LOC classification: TK7871.85 | .W65 2012Online resources: Click to View
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Includes bibliographical references and index.

Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.

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