Normal view MARC view ISBD view

Semiconductor strain metrology principles and applications /

Wong, Terence K. S.

Semiconductor strain metrology principles and applications / [electronic resource] : Terence K.S. Wong. - [Saif Zone, Sharjah, U.A.E] ; Oak Park, IL : Bentham Science, [2012] - 136 p. : ill.

Includes bibliographical references and index.

Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.

ISBN:

Subjects--Topical Terms:
Semiconductors--Design and construction--Materials.
Compound semiconductors--Design and construction--Materials.
Silicon-on-insulator technology.

Index Terms--Genre/Form:
Electronic books.

LC Class. No.: TK7871.85 / .W65 2012

Print
Add to your cart (remove)
Suggest for purchase
Save record
BIBTEX Dublin Core MARCXML MARC (non-Unicode/MARC-8) MARC (Unicode/UTF-8) MARC (Unicode/UTF-8, Standard) MODS (XML) RIS ISBD
More searches

Search for this title in:
Other Libraries (WorldCat) Other Databases (Google Scholar) Online Stores (Bookfinder.com) Open Library (openlibrary.org)