Reliability of MEMS [electronic resource] : testing of materials and devices / edited by Osamu Tabata, Toshiyuki Tsuchiya.

Contributor(s): Tabata, Osamu | Tsuchiya, Toshiyuki | ProQuest (Firm)Material type: TextTextSeries: Advanced micro & nanosystemsPublication details: Weinheim : Wiley-VCH, 2013Description: xx, 303 p. : illSubject(s): Microelectromechanical systems -- ReliabilityGenre/Form: Electronic books.DDC classification: 539.60113 LOC classification: TK7875 | .R45 2013Online resources: Click to View
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First edition 2007.

Includes bibliographical references and index.

Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.

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