Reliability of MEMS testing of materials and devices /

Reliability of MEMS testing of materials and devices / [electronic resource] : edited by Osamu Tabata, Toshiyuki Tsuchiya. - Weinheim : Wiley-VCH, 2013. - xx, 303 p. : ill. - Advanced micro & nanosystems . - Advanced micro & nanosystems. .

First edition 2007.

Includes bibliographical references and index.


Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.




Microelectromechanical systems--Reliability.


Electronic books.

TK7875 / .R45 2013

539.60113