Resonant MEMS : fundamentals, implementation and application / edited by Oliver Brand [and three others].
Material type: TextSeries: Advanced micro & nanosystemsPublisher: Weinheim, Baden-Wurttemberg, Germany : Wiley-VCH, 2015Copyright date: 2015Description: 1 online resource (512 pages) : illustrations (some color), graphsContent type: text Media type: computer Carrier type: online resourceISBN: 9783527676361Subject(s): Microelectromechanical systems -- Design and construction | Microfabrication | ResonanceGenre/Form: Electronic books.Additional physical formats: Print version:: Resonant MEMS : fundamentals, implementation and application.DDC classification: 621.381 LOC classification: TK7875 | .R476 2015Online resources: Click to ViewIncludes bibliographical references at the end of each chapters and index.
Description based on online resource; title from PDF title page (ebrary, viewed May 21, 2015).
Electronic reproduction. Ann Arbor, MI : ProQuest, 2016. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.
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