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Resonant MEMS : fundamentals, implementation and application /

Resonant MEMS : fundamentals, implementation and application / edited by Oliver Brand [and three others]. - 1 online resource (512 pages) : illustrations (some color), graphs. - Advanced Micro & Nanosystems . - Advanced micro & nanosystems. .

Includes bibliographical references at the end of each chapters and index.

ISBN: 9783527676361

Subjects--Topical Terms:
Microelectromechanical systems--Design and construction.
Microfabrication.
Resonance.

Index Terms--Genre/Form:
Electronic books.

LC Class. No.: TK7875 / .R476 2015

Dewey Class. No.: 621.381

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