Advanced micro-device engineering III : selected, peer reviewed papers from the 3rd International Conference on Advanced Micro-Device Engineering (AMDE2011), December 8th, 2011, Kiryu City Performing Arts Center, Kiryu, Japan / edited by Sumio Hosaka.
Material type: TextSeries: Key engineering materials ; 534Publisher: Durnten-Zurich, Switzerland : Trans Tech Publications, [2013]Copyright date: 2013Description: 1 online resource (277 pages) : illustrationsContent type: text Media type: computer Carrier type: online resourceISBN: 9783038139201Subject(s): Microtechnology -- Congresses | Mechatronics -- CongressesGenre/Form: Electronic books.LOC classification: T174.7 | .I586 2013Online resources: Click to ViewIncludes bibliographical references and indexes.
Description based on online resource; title from PDF title page (ebrary, viewed October 31, 2013).
Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.
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