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Advanced micro-device engineering III : selected, peer reviewed papers from the 3rd International Conference on Advanced Micro-Device Engineering (AMDE2011), December 8th, 2011, Kiryu City Performing Arts Center, Kiryu, Japan /

Advanced micro-device engineering III : selected, peer reviewed papers from the 3rd International Conference on Advanced Micro-Device Engineering (AMDE2011), December 8th, 2011, Kiryu City Performing Arts Center, Kiryu, Japan / edited by Sumio Hosaka. - 1 online resource (277 pages) : illustrations. - Key engineering materials ; 534 .

Includes bibliographical references and indexes.

ISBN: 9783038139201

Subjects--Topical Terms:
Microtechnology--Congresses.
Mechatronics--Congresses.

Index Terms--Genre/Form:
Electronic books.

LC Class. No.: T174.7 / .I586 2013

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