Handbook of 3D integration. Volume 3, 3D process technology / edited by Philip Garrou, Mitsumasa Koyanagi, and Peter Ramm ; Richard A. Allen [and sixty others], contributors.

Contributor(s): Garrou, Philip [editor.] | Koyanagi, Mitsumasa [editor.] | Ramm, Peter [editor.] | Allen, Ricky [contributor.]Material type: TextTextPublisher: Weinheim, Germany : Wiley-VCH, 2014Copyright date: 2014Description: 1 online resource (475 pages) : illustrations (some color)Content type: text Media type: computer Carrier type: online resourceISBN: 9783527670130; 9783527670123; 9783527670116; 9783527670109Subject(s): Integrated circuits | Integrated circuits -- Design and construction | Silicon | Three-dimensional imagingGenre/Form: Electronic books.Additional physical formats: Print version:: Handbook of 3D integration. Volume 3, 3D process technology.DDC classification: 621.3815 LOC classification: TK7874 | .H363 2014Online resources: Click to View
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Includes bibliographical references at the end of each chapters and index.

Description based on online resource; title from PDF title page (ebrary, viewed May 5, 2014).

Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.

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