Handbook of 3D integration. Volume 3, 3D process technology /

Handbook of 3D integration. Volume 3, 3D process technology / edited by Philip Garrou, Mitsumasa Koyanagi, and Peter Ramm ; Richard A. Allen [and sixty others], contributors. - 1 online resource (475 pages) : illustrations (some color)

Includes bibliographical references at the end of each chapters and index.

9783527670130 9783527670123 9783527670116 9783527670109


Integrated circuits.
Integrated circuits--Design and construction.
Silicon.
Three-dimensional imaging.


Electronic books.

TK7874 / .H363 2014

621.3815