Fundamentals of microfabrication and nanotechnology. Volume III : from MEMS to bio-MEMS and bio-NEMS : manufacturing techniques and applications / Marc J. Madou.

By: Madou, Marc J [author.]Material type: TextTextPublisher: Boca Raton, Florida ; London, [England] ; New York : CRC Press, 2011Copyright date: 2011Edition: Third editionDescription: 1 online resource (642 pages) : illustrations (some color), tablesContent type: text Media type: computer Carrier type: online resourceISBN: 9781439895245Subject(s): Microelectromechanical systems | Nanoelectromechanical systems | Microfluidics | Solid state physicsGenre/Form: Electronic books.Additional physical formats: Print version:: Fundamentals of microfabrication and nanotechnology. Volume III.DDC classification: 620.5 LOC classification: TK7875 | .M336 2011Online resources: Click to View
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Includes bibliographical references at the end of each chapters.

Description based on print version record.

Electronic reproduction. Ann Arbor, MI : ProQuest, 2016. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.

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