Fundamentals of microfabrication and nanotechnology. from MEMS to bio-MEMS and bio-NEMS : manufacturing techniques and applications / Volume III :

Madou, Marc J.,

Fundamentals of microfabrication and nanotechnology. from MEMS to bio-MEMS and bio-NEMS : manufacturing techniques and applications / Volume III : Marc J. Madou. - Third edition. - 1 online resource (642 pages) : illustrations (some color), tables

Includes bibliographical references at the end of each chapters.

9781439895245


Microelectromechanical systems.
Nanoelectromechanical systems.
Microfluidics.
Solid state physics.


Electronic books.

TK7875 / .M336 2011

620.5