000			01349nam a2200337Ia 4500
001			EBC976639
003			MiAaPQ
005			20240120133744.0
006			m o d |
007			cr cn|||||||||
008			120813s2012 ts a sb 001 0 eng d
020			_z9781608053599
035			_a(MiAaPQ)EBC976639
035			_a(Au-PeEL)EBL976639
035			_a(CaPaEBR)ebr10570978
035			_a(OCoLC)806204694
040			_aMiAaPQ _cMiAaPQ _dMiAaPQ
050		4	_aTK7871.85 _b.W65 2012
100	1		_aWong, Terence K. S.
245	1	0	_aSemiconductor strain metrology _h[electronic resource] : _bprinciples and applications / _cTerence K.S. Wong.
260			_a[Saif Zone, Sharjah, U.A.E] ; _aOak Park, IL : _bBentham Science, _c[2012]
300			_a136 p. : _bill.
504			_aIncludes bibliographical references and index.
533			_aElectronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.
650		0	_aSemiconductors _xDesign and construction _xMaterials.
650		0	_aCompound semiconductors _xDesign and construction _xMaterials.
650		0	_aSilicon-on-insulator technology.
655		4	_aElectronic books.
710	2		_aProQuest (Firm)
856	4	0	_uhttps://ebookcentral.proquest.com/lib/bacm-ebooks/detail.action?docID=976639 _zClick to View
999			_c81803 _d81803