000			01566nam a2200421Ia 4500
001			EBC886626
003			MiAaPQ
005			20240120133400.0
006			m o d |
007			cr cn|||||||||
008			110808s2011 enk s 000 0 eng d
010			_z 2011028174
020			_z9780199734214
020			_z9780199920990
035			_a(MiAaPQ)EBC886626
035			_a(Au-PeEL)EBL886626
035			_a(CaPaEBR)ebr10532647
035			_a(CaONFJC)MIL362333
035			_a(OCoLC)777268040
040			_aMiAaPQ _cMiAaPQ _dMiAaPQ
050		4	_aTA418.9.N35 _bN2525 2011
082	0	4	_a620.1/15 _223
245	0	0	_aNanofabrication using focused ion and electron beams _h[electronic resource] : _bprinciples and applications / _cedited by Ivo Utke, Stanislav Moshkalev, Phillip Russell.
260			_aOxford ; _aNew York : _bOxford University Press, _c2011.
300			_axvi, 813 p.
490	0		_aNanomanufacturing series ; _vv. 1
533			_aElectronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.
650		0	_aNanostructured materials.
650		0	_aNanotechnology.
650		0	_aElectron beams _xIndustrial applications.
650		0	_aIon bombardment _xIndustrial applications.
655		4	_aElectronic books.
700	1		_aUtke, Ivo.
700	1		_aMoshkalev, Stanislav.
700	1		_aRussell, Phillip, _d1955-
710	2		_aProQuest (Firm)
856	4	0	_uhttps://ebookcentral.proquest.com/lib/bacm-ebooks/detail.action?docID=886626 _zClick to View
999			_c76841 _d76841