| 000 | 01349nam a2200361 a 4500 | ||
|---|---|---|---|
| 001 | EBC481311 | ||
| 003 | MiAaPQ | ||
| 005 | 20240120131444.0 | ||
| 006 | m o d | | ||
| 007 | cr cn||||||||| | ||
| 008 | 130422s2013 gw a sb 001 0 eng d | ||
| 020 | _z9783527334988 | ||
| 020 | _a9783527675043 (electronic bk.) | ||
| 035 | _a(MiAaPQ)EBC481311 | ||
| 035 | _a(Au-PeEL)EBL481311 | ||
| 035 | _a(CaPaEBR)ebr10683273 | ||
| 035 | _a(CaONFJC)MIL476124 | ||
| 035 | _a(OCoLC)214281565 | ||
| 040 |
_aMiAaPQ _cMiAaPQ _dMiAaPQ |
||
| 050 | 4 |
_aTK7874 _b.E53 2013 |
|
| 245 | 0 | 0 |
_aEnabling technologies for MEMS and nanodevices _h[electronic resource] : _badvanced micro and nanosystems / _cedited by Henry Baltes ... [et al.]. |
| 260 |
_aWeinheim [Germany] : _bWiley, _c2013. |
||
| 300 |
_axii, 427 p. : _bill. |
||
| 504 | _aIncludes bibliographical references and index. | ||
| 533 | _aElectronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries. | ||
| 650 | 0 | _aMicroelectronics. | |
| 650 | 0 | _aNanotechnology. | |
| 650 | 0 | _aMicroelectromechanical systems. | |
| 655 | 4 | _aElectronic books. | |
| 700 | 1 | _aBaltes, Henry. | |
| 710 | 2 | _aProQuest (Firm) | |
| 856 | 4 | 0 |
_uhttps://ebookcentral.proquest.com/lib/bacm-ebooks/detail.action?docID=481311 _zClick to View |
| 999 |
_c49163 _d49163 |
||