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007			cr cn|||||||||
008			920422s1992 dcua sb 000 0 eng
010			_z 92060205
020			_z0309046351
035			_a(MiAaPQ)EBC3376029
035			_a(Au-PeEL)EBL3376029
035			_a(CaPaEBR)ebr10055022
035			_a(CaONFJC)MIL21147
035			_a(OCoLC)923260597
040			_aMiAaPQ _cMiAaPQ _dMiAaPQ
050		4	_aTK7836 _b.N37 1992
082	0	4	_a621.381 _220
110	2		_aNational Research Council (U.S.). _bCommittee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems.
245	1	0	_aBeam technologies for integrated processing _h[electronic resource] : _breport of the Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council.
260			_aWashington, D.C. : _bNational Academy Press, _c1992.
300			_axii, 89 p. : _bill.
500			_a"NMAB-461."
504			_aIncludes bibliographical references.
533			_aElectronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.
650		0	_aMicroelectronics industry.
650		0	_aMolecular beams _xIndustrial applications.
650		0	_aMicroelectronics _xMaterials.
650		0	_aPlasma-enhanced chemical vapor deposition _xIndustrial applications.
655		4	_aElectronic books.
710	2		_aProQuest (Firm)
856	4	0	_uhttps://ebookcentral.proquest.com/lib/bacm-ebooks/detail.action?docID=3376029 _zClick to View
999			_c201043 _d201043