| 000 | 01522nam a2200397 a 4500 | ||
|---|---|---|---|
| 001 | EBC3319918 | ||
| 003 | MiAaPQ | ||
| 005 | 20240121043324.0 | ||
| 006 | m o d | | ||
| 007 | cr cn||||||||| | ||
| 008 | 120309s2011 gw a sbm 000 0 eng d | ||
| 020 | _z9783862191123 | ||
| 020 | _z9783862191130 (e-book) | ||
| 035 | _a(MiAaPQ)EBC3319918 | ||
| 035 | _a(Au-PeEL)EBL3319918 | ||
| 035 | _a(CaPaEBR)ebr10534087 | ||
| 035 | _a(OCoLC)785782788 | ||
| 040 |
_aMiAaPQ _cMiAaPQ _dMiAaPQ |
||
| 041 | 1 |
_aeng _bger |
|
| 050 | 4 |
_aT385 _b.W36 2011 |
|
| 100 | 1 | _aWang, Xiaolin. | |
| 245 | 1 | 0 |
_aHigh resolution 3D nanoimprint technology _h[electronic resource] : _btemplate fabrication, application in Fabry-Perot-filter-based nanospectrometers / _cXiaolin Wang. |
| 260 |
_aKassel [Germany] : _bKassel University Press, _c2011. |
||
| 300 |
_aiii, 160 p. : _bill. (chiefly col.) |
||
| 500 | _aSummary in German. | ||
| 502 | _aThesis (doctoral)--University of Kassel, 2010. | ||
| 504 | _aIncludes bibliographical references. | ||
| 533 | _aElectronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries. | ||
| 650 | 0 | _aThree-dimensional imaging. | |
| 650 | 0 | _aHigh resolution imaging. | |
| 650 | 0 | _aFabry-Perot interferometers. | |
| 650 | 0 | _aNanotechnology. | |
| 655 | 4 | _aElectronic books. | |
| 710 | 2 | _aProQuest (Firm) | |
| 856 | 4 | 0 |
_uhttps://ebookcentral.proquest.com/lib/bacm-ebooks/detail.action?docID=3319918 _zClick to View |
| 999 |
_c189545 _d189545 |
||