| 000 | 01887nam a2200421 i 4500 | ||
|---|---|---|---|
| 001 | EBC1872994 | ||
| 003 | MiAaPQ | ||
| 005 | 20240123070713.0 | ||
| 006 | m o d | | ||
| 007 | cr cnu|||||||| | ||
| 008 | 111102t20132013sz a ob 001 0 eng d | ||
| 020 | _z9783037855393 | ||
| 020 |
_a9783038139201 _q(electronic bk.) |
||
| 035 | _a(MiAaPQ)EBC1872994 | ||
| 035 | _a(Au-PeEL)EBL1872994 | ||
| 035 | _a(CaPaEBR)ebr10777794 | ||
| 035 | _a(OCoLC)897641197 | ||
| 040 |
_aMiAaPQ _beng _erda _epn _cMiAaPQ _dMiAaPQ |
||
| 050 | 4 |
_aT174.7 _b.I586 2013 |
|
| 111 | 2 |
_aInternational Conference on Advanced Micro-Device Engineering _n(3rd : _d2011 : _cKiryu-shi, Japan) |
|
| 245 | 1 | 0 |
_aAdvanced micro-device engineering III : _bselected, peer reviewed papers from the 3rd International Conference on Advanced Micro-Device Engineering (AMDE2011), December 8th, 2011, Kiryu City Performing Arts Center, Kiryu, Japan / _cedited by Sumio Hosaka. |
| 264 | 1 |
_aDurnten-Zurich, Switzerland : _bTrans Tech Publications, _c[2013] |
|
| 264 | 4 | _c2013 | |
| 300 |
_a1 online resource (277 pages) : _billustrations. |
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| 336 |
_atext _2rdacontent |
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| 337 |
_acomputer _2rdamedia |
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| 338 |
_aonline resource _2rdacarrier |
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| 440 | 0 |
_aKey engineering materials ; _v534 |
|
| 504 | _aIncludes bibliographical references and indexes. | ||
| 588 | _aDescription based on online resource; title from PDF title page (ebrary, viewed October 31, 2013). | ||
| 590 | _aElectronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries. | ||
| 650 | 0 |
_aMicrotechnology _vCongresses. |
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| 650 | 0 |
_aMechatronics _vCongresses. |
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| 655 | 4 | _aElectronic books. | |
| 700 | 1 | _aHosaka, Sumio. | |
| 797 | 2 | _aProQuest (Firm) | |
| 856 | 4 | 0 |
_uhttps://ebookcentral.proquest.com/lib/bacm-ebooks/detail.action?docID=1872994 _zClick to View |
| 999 |
_c120912 _d120912 |
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