| 000 | 01799nam a22004451i 4500 | ||
|---|---|---|---|
| 001 | EBC1550523 | ||
| 003 | MiAaPQ | ||
| 005 | 20240120151542.0 | ||
| 006 | m o d | | ||
| 007 | cr cnu|||||||| | ||
| 008 | 131209s2014 enka ob 001 0 eng d | ||
| 020 | _z9780815515937 (hbk.) | ||
| 020 |
_a9780815519874 _q(electronic bk.) |
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| 035 | _a(MiAaPQ)EBC1550523 | ||
| 035 | _a(Au-PeEL)EBL1550523 | ||
| 035 | _a(CaPaEBR)ebr10800153 | ||
| 035 | _a(CaONFJC)MIL543246 | ||
| 035 | _a(OCoLC)863203964 | ||
| 040 |
_aMiAaPQ _beng _erda _epn _cMiAaPQ _dMiAaPQ |
||
| 050 | 4 |
_aTK7871 _b.S37 2012 |
|
| 082 | 0 |
_a621.381 _222 |
|
| 100 | 1 | _aSarkar, Jaydeep. | |
| 245 | 1 | 0 |
_aSputtering materials for VLSI and thin film devices / _cby Jaydeep Sarkar. |
| 250 | _aFirst edition. | ||
| 264 | 1 |
_aOxford ; _aBoston : _bWilliam Andrew Publishing, _c2014. |
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| 300 |
_a1 online resource (614 pages) : _billustrations |
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| 336 |
_atext _2rdacontent |
||
| 337 |
_acomputer _2rdamedia |
||
| 338 |
_aonline resource _2rdacarrier |
||
| 504 | _aIncludes bibliographical references and index. | ||
| 588 | _aDescription based on print version record. | ||
| 590 | _aElectronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries. | ||
| 650 | 0 |
_aMicroelectronics _xMaterials. |
|
| 650 | 0 |
_aFlat panel displays _xMaterials. |
|
| 650 | 0 | _aSputtering (Physics) | |
| 655 | 4 | _aElectronic books. | |
| 776 | 0 | 8 |
_iPrint version: _aSarkar, Jaydeep. _tSputtering materials for VLSI and thin film devices. _dOxford : William Andrew Publishing, 2014 _hx, 603 pages : illustrations ; 24 cm. _z9780815515937 |
| 797 | 2 | _aProQuest (Firm) | |
| 856 | 4 | 0 |
_uhttps://ebookcentral.proquest.com/lib/bacm-ebooks/detail.action?docID=1550523 _zClick to View |
| 999 |
_c104732 _d104732 |
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