Advanced interconnects for ULSI technology [electronic resource] / edited by Mikhail Baklanov, Paul S. Ho and Ehrenfried Zschech.

Contributor(s): Baklanov, Mikhail | Ho, P. S | Zschech, Ehrenfried | ProQuest (Firm)Material type: TextTextPublication details: Chichester, West Susex : Wiley, 2012Description: xxvi, 579 p. : illSubject(s): Integrated circuits -- Ultra large scale integration | Interconnects (Integrated circuit technology)Genre/Form: Electronic books.DDC classification: 621.39/5 LOC classification: TK7874.53 | .A39 2012Online resources: Click to View
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Includes bibliographical references and index.

Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.

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