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Handbook of 3D integration. Volume 3, 3D process technology / edited by Philip Garrou, Mitsumasa Koyanagi, and Peter Ramm ; Richard A. Allen [and sixty others], contributors. by Garrou, Philip [editor.] | Koyanagi, Mitsumasa [editor.] | Ramm, Peter [editor.] | Allen, Ricky [contributor.]. Material type:  Text; Format:
available online
 ; Literary form:
Not fiction
Publisher: Weinheim, Germany : Wiley-VCH, 2014Copyright date: 2014Online access: Click to View Availability: No items available.
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