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FBAR, MEMS and NEMS resonator design and applications [electronic resource] / Humberto Campanella.

By: Campanella, HumbertoContributor(s): ProQuest (Firm)Material type: Text

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TextPublication details: Boston : Artech House, c2010Description: xv, 345 p. : illSubject(s): Acoustic surface wave devices | Electric resonatorsGenre/Form: Electronic books.LOC classification: TK5981 | .C36 2010Online resources: Click to View

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Includes index.

Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.

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