TY  - BOOK
AU  - Wong,Terence K.S.
ED  - ProQuest (Firm)
TI  - Semiconductor strain metrology: principles and applications 
AV  - TK7871.85 .W65 2012
PY  - 2012///]
CY  - [Saif Zone, Sharjah, U.A.E], Oak Park, IL
PB  - Bentham Science
KW  - Semiconductors
KW  - Design and construction
KW  - Materials
KW  - Compound semiconductors
KW  - Silicon-on-insulator technology
KW  - Electronic books
N1  - Includes bibliographical references and index; Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries
UR  - https://ebookcentral.proquest.com/lib/bacm-ebooks/detail.action?docID=976639
ER  -