TY  - BOOK
AU  - Utke,Ivo
AU  - Moshkalev,Stanislav
AU  - Russell,Phillip
ED  - ProQuest (Firm)
TI  - Nanofabrication using focused ion and electron beams: principles and applications 
T2  - Nanomanufacturing series
AV  - TA418.9.N35 N2525 2011
U1  - 620.1/15 23
PY  - 2011///
CY  - Oxford, New York
PB  - Oxford University Press
KW  - Nanostructured materials
KW  - Nanotechnology
KW  - Electron beams
KW  - Industrial applications
KW  - Ion bombardment
KW  - Electronic books
N1  - Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries
UR  - https://ebookcentral.proquest.com/lib/bacm-ebooks/detail.action?docID=886626
ER  -