Nanofabrication using focused ion and electron beams  principles and applications /  [electronic resource] : 
edited by Ivo Utke, Stanislav Moshkalev, Phillip Russell. 
 - Oxford ;  New York :  Oxford University Press,  2011. 
 - xvi, 813 p. 
 - Nanomanufacturing series ;  v. 1 .
<br/><br/><br/>Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries. 
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<br/><br/><label>Subjects--Topical Terms: </label><br/>Nanostructured materials.<br/>Nanotechnology.<br/>Electron beams--Industrial applications.<br/>Ion bombardment--Industrial applications.
<br/><br/><label>Index Terms--Genre/Form: </label><br/>Electronic books.
<br/><br/><label>LC Class. No.: </label>TA418.9.N35  / N2525 2011 
<br/><br/><label>Dewey Class. No.: </label>620.1/15