TY  - BOOK
AU  - Baklanov,Mikhail
AU  - Ho,P.S.
AU  - Zschech,Ehrenfried
ED  - ProQuest (Firm)
TI  - Advanced interconnects for ULSI technology
AV  - TK7874.53 .A39 2012
U1  - 621.39/5 23
PY  - 2012///
CY  - Chichester, West Susex
PB  - Wiley
KW  - Integrated circuits
KW  - Ultra large scale integration
KW  - Interconnects (Integrated circuit technology)
KW  - Electronic books
N1  - Includes bibliographical references and index; Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries
UR  - https://ebookcentral.proquest.com/lib/bacm-ebooks/detail.action?docID=865036
ER  -