Advanced interconnects for ULSI technology [electronic resource] / edited by Mikhail Baklanov, Paul S. Ho and Ehrenfried Zschech. - Chichester, West Susex : Wiley, 2012. - xxvi, 579 p. : ill.

Includes bibliographical references and index.


Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.






Integrated circuits--Ultra large scale integration.
Interconnects (Integrated circuit technology)


Electronic books.

TK7874.53 / .A39 2012

621.39/5