TY  - BOOK
AU  - Ma,Xu
AU  - Arce,Gonzalo R.
ED  - ProQuest (Firm)
TI  - Computational lithography
T2  - Wiley series in pure and applied optics
AV  - TK7872.M3 M3 2010
U1  - 621.381531 22
PY  - 2010///
CY  - Oxford
PB  - Wiley-Blackwell
KW  - Microlithography
KW  - Mathematics
KW  - Integrated circuits
KW  - Design and construction
KW  - Photolithography
KW  - Semiconductors
KW  - Etching
KW  - Resolution (Optics)
KW  - Electronic books
N1  - Includes bibliographical references and index; Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries
UR  - https://ebookcentral.proquest.com/lib/bacm-ebooks/detail.action?docID=588875
ER  -