TY - BOOK AU - Campanella,Humberto ED - ProQuest (Firm) TI - FBAR, MEMS and NEMS resonator design and applications AV - TK5981 .C36 2010 PY - 2010/// CY - Boston PB - Artech House KW - Acoustic surface wave devices KW - Electric resonators KW - Electronic books N1 - Includes index; Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries UR - https://ebookcentral.proquest.com/lib/bacm-ebooks/detail.action?docID=583647 ER -