TY  - BOOK
AU  - Baltes,Henry
ED  - ProQuest (Firm)
TI  - Enabling technologies for MEMS and nanodevices: advanced micro and nanosystems 
AV  - TK7874 .E53 2013
PY  - 2013///
CY  - Weinheim [Germany]
PB  - Wiley
KW  - Microelectronics
KW  - Nanotechnology
KW  - Microelectromechanical systems
KW  - Electronic books
N1  - Includes bibliographical references and index; Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries
UR  - https://ebookcentral.proquest.com/lib/bacm-ebooks/detail.action?docID=481311
ER  -