Enabling technologies for MEMS and nanodevices  advanced micro and nanosystems /  [electronic resource] : 
edited by Henry Baltes ... [et al.]. 
 - Weinheim [Germany] :  Wiley,  2013. 
 - xii, 427 p. :  ill. 
<br/><br/>Includes bibliographical references and index. 
<br/><br/><br/>Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries. 
<br/><br/><label>ISBN: </label>9783527675043 (electronic bk.) 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectronics.<br/>Nanotechnology.<br/>Microelectromechanical systems.
<br/><br/><label>Index Terms--Genre/Form: </label><br/>Electronic books.
<br/><br/><label>LC Class. No.: </label>TK7874  / .E53 2013