TY  - BOOK
AU  - Sun,Yu
AU  - Liu,Xinyu
AU  - Abramson,Alex
TI  - Micro- and nanomanipulation tools
T2  - Advanced Micro & Nanosystems
AV  - TK7875 .M537 2015
U1  - 537.6226 23
PY  - 2015///
CY  - Weinheim, Germany
PB  - Wiley-VCH Verlag GmbH & Co. KGaA
KW  - Nanoelectromechanical systems
KW  - Micrurgy
KW  - Electronic books
N1  - Includes bibliographical references at the end of each chapters and index
UR  - https://ebookcentral.proquest.com/lib/bacm-ebooks/detail.action?docID=4044618
ER  -