TY  - BOOK
AU  - Santos,Hector J.de los
ED  - ProQuest (Firm)
TI  - Introduction to microelectromechanical microwave systems
T2  - Artech House MEMS and sensors library
AV  - TK7876 .S28 2004
U1  - 621.381/3 22
PY  - 2004///
CY  - Boston
PB  - Artech House
KW  - Microwave devices
KW  - Microelectromechanical systems
KW  - Electronic books
N1  - Includes bibliographical references and index; Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries
UR  - https://ebookcentral.proquest.com/lib/bacm-ebooks/detail.action?docID=227696
ER  -