Santos, Hector J. de los. <br/><br/>
Introduction to microelectromechanical microwave systems  [electronic resource] / 
Hector J. de los Santos. 
 - 2nd ed. 
 - Boston :  Artech House,  c2004. 
 - xiii, 221 p. :  ill. 
 - Artech House MEMS and sensors library .
 - Microelectromechanical systems series. .
<br/><br/>Includes bibliographical references and index. 
<br/><br/><br/>Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries. 
<br/><br/><label>ISBN: </label>
<br/><br/><label>LCCN: </label>
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microwave devices.<br/>Microelectromechanical systems.
<br/><br/><label>Index Terms--Genre/Form: </label><br/>Electronic books.
<br/><br/><label>LC Class. No.: </label>TK7876  / .S28 2004 
<br/><br/><label>Dewey Class. No.: </label>621.381/3