TY  - BOOK
AU  - Chen,Francis F.
ED  - National Research Council (U.S.).
ED  - National Research Council (U.S.).
ED  - National Research Council (U.S.).
ED  - ProQuest (Firm)
TI  - Plasma processing and processing science
T2  - NRL strategic series
AV  - TA2020 .P5 1995
U1  - 621.044 22
PY  - 1995///
CY  - Washington, D.C.
PB  - National Academy Press
KW  - Plasma engineering
KW  - Semiconductors
KW  - Etching
KW  - Plasma etching
KW  - Electronic books
N1  - Committee chair:  Francis F. Chen; This work was performed under Department of Navy Contract N00014-93-C-0089 issued by the Office of Naval Research under contract authority NR 201-124; Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries
UR  - https://ebookcentral.proquest.com/lib/bacm-ebooks/detail.action?docID=3377403
ER  -