Beam technologies for integrated processing  report of the Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council.  [electronic resource] : 

 - Washington, D.C. :  National Academy Press,  1992. 
 - xii, 89 p. :  ill. 
<br/><br/> "NMAB-461." 
<br/><br/>Includes bibliographical references. 
<br/><br/><br/>Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries. 
<br/><br/><label>ISBN: </label>
<br/><br/><label>LCCN: </label>
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectronics industry.<br/>Molecular beams--Industrial applications.<br/>Microelectronics--Materials.<br/>Plasma-enhanced chemical vapor deposition--Industrial applications.
<br/><br/><label>Index Terms--Genre/Form: </label><br/>Electronic books.
<br/><br/><label>LC Class. No.: </label>TK7836  / .N37 1992 
<br/><br/><label>Dewey Class. No.: </label>621.381