High resolution 3D nanoimprint technology template fabrication, application in Fabry-Perot-filter-based nanospectrometers / [electronic resource] :
Xiaolin Wang.
- Kassel [Germany] : Kassel University Press, 2011.
- iii, 160 p. : ill. (chiefly col.)
Summary in German.
Thesis (doctoral)--University of Kassel, 2010.
Includes bibliographical references.
Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.
Three-dimensional imaging. High resolution imaging. Fabry-Perot interferometers. Nanotechnology.