Resonant MEMS :  fundamentals, implementation and application / 
edited by Oliver Brand [and three others]. 
 - 1 online resource (512 pages) :  illustrations (some color), graphs. 
 - Advanced Micro & Nanosystems .
 - Advanced micro & nanosystems. .
<br/><br/>Includes bibliographical references at the end of each chapters and index. 
<br/><br/><label>ISBN: </label>9783527676361 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems--Design and construction.<br/>Microfabrication.<br/>Resonance.
<br/><br/><label>Index Terms--Genre/Form: </label><br/>Electronic books.
<br/><br/><label>LC Class. No.: </label>TK7875  / .R476 2015 
<br/><br/><label>Dewey Class. No.: </label>621.381