Advanced micro-device engineering IV :  selected, peer reviewed papers from the 4th International Conference on Advanced Micro-Device Engineering (AMDE 2012), December 7, 2012, Kiryu City Performing Arts Center, Kiryu, Japan / 
edited by Sumio Hosaka. 
 - 1 online resource (228 pages) :  illustrations, tables. 
 - Key Engineering Materials,  Volume 596  1662-9795 ; .
 - Key engineering materials ;  v. 596. .
<br/><br/>Includes bibliographical references at the end of each chapters and indexes. 
<br/><br/><label>ISBN: </label>9783038263432 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectronics--Congresses.
<br/><br/><label>Index Terms--Genre/Form: </label><br/>Electronic books.
<br/><br/><label>LC Class. No.: </label>TK7874  / .I584 2014 
<br/><br/><label>Dewey Class. No.: </label>621.381