TY  - BOOK
AU  - Hosaka,Sumio
ED  - International Conference on Advanced Micro-Device Engineering
TI  - Advanced micro-device engineering IV: selected, peer reviewed papers from the 4th International Conference on Advanced Micro-Device Engineering (AMDE 2012), December 7, 2012, Kiryu City Performing Arts Center, Kiryu, Japan 
T2  - Key Engineering Materials,
AV  - TK7874 .I584 2014
U1  - 621.381 23
PY  - 2014///
CY  - Durnten-Zurich, Switzerland
PB  - Trans Tech Publications
KW  - Microelectronics
KW  - Congresses
KW  - Electronic books
N1  - Includes bibliographical references at the end of each chapters and indexes
UR  - https://ebookcentral.proquest.com/lib/bacm-ebooks/detail.action?docID=1910523
ER  -